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KGM 181/KGM 182/KGM 282

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KGM 181

KGM 182

KGM 282

Measuring standard

Coefficient of linear expansion

Two-coordinate TITANID phase grating

αtherm ≈  8 x 10-6 K-1

Accuracy grade

± 2 µm

± 1 µm

Measuring range

∅ 140 mm

∅ 230 mm

Incremental signals

1 VPP

Signal period

4 µm in measuring directions I and II

Measuring step

≥ 0.001 µm (with EIB 74x)

Voltage supply

5 V ± 0.25 V/< 100 mA (per axis)

Mount for scanning head

∅ 20h7

Traversing speed

≤ 80 m/min

≤ 72 m/min

Weight (approx.)

Grid plate

Scanning head

4.0 kg

0.6 kg

3.1 kg

0.6 kg

4.9 kg

0.6 kg